W-357BM-1200
High-frequency separate type
Application
- Magnetic head cleaning
- Silicon wafer cleaning
- Cleaning of sapphire wafers
- Cleaning of semiconductor devices after processing
- Hard disk cleaning
- Cleaning of aluminum and mirror-polished product which is easily damaged
Special Features
- Digital control enables stable oscillation.
- Various interfaces enable control according to the cleaning system.
- Ultrasonic output can be adjusted in 1W increments.
Target Contamination
- Particles
- Flux
- Chemicals
Generator
| Model | W-357BM-600 | W-357BM-1200 |
|---|---|---|
| Oscillation method | Single Frequency Oscillation | |
| Rated output | 600W | 1200W |
| Output variable range | 100W~600W | 200W~1200W |
| Nominal oscillation frequency | 1MHｚ | 1MHｚ |
| Power input | AC200V〜240V Single phase 50/60Hz 1200VA | AC200V〜240V Single phase 50/60Hz 2400VA |
| Display | VFD (fluorescent display tube) 16 characters x 2 lines | |
| Interface Analog output | 4-20mA current output | 4-20mA current output |
| Interface Contact output | 3 points Alarm output, oscillation detection output, power ON output | |
| Interface External drive input | 2 points Sensor input, Remote input | 2 points Sensor input, Remote input |
| Interface RS485 communication | MODBUS® protocol, RTU mode *1 | MODBUS® protocol, RTU mode *1 |
| External Dimensions （Excluding protruding parts, including rubber feet） WxDxHmm | 220×360×143 | 360×360×143 |
| Weight | 5kg | 7kg |
- Ambient operating environment: Temperature: 5~40℃, Humidity: 5~80% (no condensation)
- Power cable length: 3m
*1 MODBUS is a registered trademark of Schneider Electric USA Inc.
Transducer Unit
- Custom-made transducer units are available upon request.
- Maximum allowable input: 600W/1200W/1800W/2400W/3000W/3600W
- Compatible wafers: 6 inches / 8 inches / 12 inches
F Type ｜ Vibration plate type
| Model | W-357BM-600F | W-357BM-1200F |
|---|---|---|
| Oscillator Type | W-357BM-600 | W-357BM-1200 |
| Maximum allowable input | 600W | 1200W |
| Nominal drive frequency | 1MHｚ | 1MHｚ |
| Effective cleaning surface W×Dmm | 135×160 | 272×154 |
| External Dimensions W×D×Hmm （Wiring and piping not included） | 250×220×68 | 355×245×68 |
| Material | Plate: SUS316L, surface electrolytic polishing | |
| Weight | 3.3kg | 7kg |
| Wafer size | 6 inch | 8 inch |
| Transducer cable length | 5m | 5m×2 |
- Liquid contact surface material: Vibration Plate : SUS316L
- Liquid temperature range: 5 to 80°C
- Transducer: PZT
S Type ｜ Tank type
| Model | W-357BM-600S | W-357BM-1200S |
|---|---|---|
| Oscillator Type | W-357BM-600 | W-357BM-1200 |
| Maximum allowable input | 600W | 1200W |
| Nominal drive frequency | 1MHｚ | 1MHｚ |
| Effective cleaning surface W×Dmm | 135×160 | 135×160 2 locations |
| Dimensions W×D×Hmm （Excluding protruding parts）Externals | 302×296×372(Including rubber feet） | 496×336×372(Including rubber feet） |
| Dimensions W×D×Hmm （Excluding protruding parts）Inside a tank | 248×236×252 | 442×276×252 |
| Material | Tank: SUS316L Packing: Viton, PTFE | Tank: SUS316L Packing: Viton, PTFE |
| Drain valve | 1/2 inch | 1/2 inch |
| Weight | 11.6kg | 18kg |
| Wafer size | 6 inch | 6 inch ×2 |
| Transducer cable length | 5m | 5m×2 |
- Liquid contact surface material: Vibration Plate, tank: SUS316L Packing: PTFE Water supply/drainage nipple: SUS304
- Liquid temperature range: 5 to 80°C
- Transducer: PZT